The numerical evaluation of intrinsic dissipation induced by thermoelastic coupling is of paramount importance in microelectromechanical systems. This paper presents a finite-element based procedure for the computation of thermoelastic dissipation in microdevices. In case of ultrathin resonators, the experiments show that damping is strongly influenced by size-dependent phenomena. In order to simulate the scale dependence of dissipation, an enhanced nonlocal coupled thermoelastic model is introduced and the first results are discussed.

Intrinsic dissipation in microelectromechanical systems

ARDITO, RAFFAELE;COMI, CLAUDIA;CORIGLIANO, ALBERTO;FRANGI, ATTILIO ALBERTO
2008-01-01

Abstract

The numerical evaluation of intrinsic dissipation induced by thermoelastic coupling is of paramount importance in microelectromechanical systems. This paper presents a finite-element based procedure for the computation of thermoelastic dissipation in microdevices. In case of ultrathin resonators, the experiments show that damping is strongly influenced by size-dependent phenomena. In order to simulate the scale dependence of dissipation, an enhanced nonlocal coupled thermoelastic model is introduced and the first results are discussed.
EuroSimE2008,9th Int. Conf. on thermal, mechanical and multiphisics simulation and experiments in mi
9781424421275
MEMS; thermoelastic damping; intrinsic dissipation
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/502368
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