Profiles of nanometric aluminum and parylene foils have been characterized by soft x-ray contact imaging using a laser-plasma source and a LiF crystal as detector. Due to the characteristic emission of this source in a 2 angle, it was possible to obtain the sample image in a wider field of view with respect to coherent sources. LiF crystal is a cheap and robust imaging detector for soft x-ray radiation, that allows one to get high spatial resolution images of thin films with thickness from hundreds down to a few tens of nanometers.

Table-top soft x-ray imaging of nanometric films

CALEGARI, FRANCESCA;STAGIRA, SALVATORE;D'ANDREA, COSIMO;VALENTINI, GIANLUCA;VOZZI, CATERINA;NISOLI, MAURO;DE SILVESTRI, SANDRO;
2006-01-01

Abstract

Profiles of nanometric aluminum and parylene foils have been characterized by soft x-ray contact imaging using a laser-plasma source and a LiF crystal as detector. Due to the characteristic emission of this source in a 2 angle, it was possible to obtain the sample image in a wider field of view with respect to coherent sources. LiF crystal is a cheap and robust imaging detector for soft x-ray radiation, that allows one to get high spatial resolution images of thin films with thickness from hundreds down to a few tens of nanometers.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/245434
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