This work summarizes design and control similarities and differences between two architectures of rate integrating gyroscopes, lumped-mass and radially distributed, developed in a mass-volume fabrication process. Comparative results are given for gain, linearity and noise. The possibility to minimize nonlinearity for lumped-mass designs results in better noise performance and lower spurious harmonics.
RIG with mass-volume epitaxial polysilicon process: lumped-mass or radially-distributed design?
Nastri, Riccardo;Gagni, Marco;Zega, Valentina;Pavesi, Davide;Frigerio, Paolo;Zoia, Stefano;Comi, Claudia;Langfelder, Giacomo
2026-01-01
Abstract
This work summarizes design and control similarities and differences between two architectures of rate integrating gyroscopes, lumped-mass and radially distributed, developed in a mass-volume fabrication process. Comparative results are given for gain, linearity and noise. The possibility to minimize nonlinearity for lumped-mass designs results in better noise performance and lower spurious harmonics.File in questo prodotto:
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