A mechanical solution for quadrature minimization in MEMS pitch/roll gyroscopes

This work presents a novel suspension spring design aimed at mitigating mechanical quadrature in pitch/roll Micro-Electro-Mechanical Systems (MEMS) gyroscopes, which are intrinsically sensitive to fabrication-induced wall-angle deviations. The proposed architecture employs anti-symmetric folded beams to induce balanced bending moments, effectively cancelling parasitic out-of-plane displacements at the mechanical level. By addressing quadrature at the structural design stage, this approach reduces reliance on complex, power-intensive electronic compensation, offering a pathway toward more robust and energy-efficient inertial sensors. Numerical simulations demonstrate that the proposed spring reduces quadrature error to approximately 30% of that observed in devices employing conventional folded beams, validating the effectiveness of the design in minimizing process-induced coupling.