This work presents a series of high performance piezoelectric Micro Electro Mechanical System (MEMS) loudspeakers for in-ear applications. They consist of piezoelectrically actuated thin plates implementing narrow gaps, and an optimized geometry configuration to improve the system linearity and power consumption. The devices feature a Sound Pressure Level (SPL) up to 109 dB SPL from 100 Hz onward for an actuation of 30 Vpp, a Total Harmonic Distortion (THD) lower than 1 % at 1 kHz and at 94 dB SPL and a compact footprint of 4, 5x4.5mm2.
High-Performance Piezoelectric MEMS Speakers for in-ear Applications
Gazzola, Chiara;Perli, Filippo P.;Rosso, Michele;Corigliano, Alberto
2025-01-01
Abstract
This work presents a series of high performance piezoelectric Micro Electro Mechanical System (MEMS) loudspeakers for in-ear applications. They consist of piezoelectrically actuated thin plates implementing narrow gaps, and an optimized geometry configuration to improve the system linearity and power consumption. The devices feature a Sound Pressure Level (SPL) up to 109 dB SPL from 100 Hz onward for an actuation of 30 Vpp, a Total Harmonic Distortion (THD) lower than 1 % at 1 kHz and at 94 dB SPL and a compact footprint of 4, 5x4.5mm2.File in questo prodotto:
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