The use of the Atomic Force Microscope (AFM) as a teaching tool in hands-on laboratory activities for electronics engineering curricula is proposed. In addition to providing nanometric resolution in topographic imaging, profilometry and metrology of micro-and nano-fabricated devices, pivotal in modern electronics, the AFM represents an excellent instrument to: (i) experiment with the negative feedback control of a sophisticated opto-electro-mechanical system, (ii) perform nanoscale current (DC) and impedance (AC) measurements and maps by means of conductive tips. Examples and results with both discrete and integrated low-noise current amplifiers are here reported.
Touching Silicon: Educational Use of the Atomic Force Microscope in Circuits and Systems
Carminati, Marco;Ferrari, Giorgio;Sampietro, Marco
2025-01-01
Abstract
The use of the Atomic Force Microscope (AFM) as a teaching tool in hands-on laboratory activities for electronics engineering curricula is proposed. In addition to providing nanometric resolution in topographic imaging, profilometry and metrology of micro-and nano-fabricated devices, pivotal in modern electronics, the AFM represents an excellent instrument to: (i) experiment with the negative feedback control of a sophisticated opto-electro-mechanical system, (ii) perform nanoscale current (DC) and impedance (AC) measurements and maps by means of conductive tips. Examples and results with both discrete and integrated low-noise current amplifiers are here reported.| File | Dimensione | Formato | |
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Touching Silicon ISCAS 2025.pdf
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