Reducing Drifts of MEMS Piezoresistive Gyroscopes in Uncontrolled Environment

This paper presents a novel compensation strategy for MEMS piezoresistive gyroscopes that combines angular rate sensing with real-time correction of temperature and stress-induced substrate deformations. The design leverages (250 nm)(2) piezoresistive strain gauges for drive and sense modes detection, enabling compensation of zero rate output (ZRO) drifts by separating low-frequency temperature and stress components from the rate component modulated at similar to 25 kHz. The resistive sensing approach provides immunity to parasitics, supporting multiple electronic circuits without degrading the 0.015 degrees/vh angle random walk (ARW). Experimental results show a 15x reduction in rate random walk (RRW) using linear compensation of ZRO drifts based on measured low-frequency stresses.