The work presents the first frequency-modulated (FM) in-plane accelerometer exploiting shaped combs as frequency-tuning mechanism. Their inherent advantage lies in that, while the overall tuning coefficient is unaltered with respect to former implementations based on parallel-plate tuning, the resonant-mode motion amplitude can be increased, without limitations from parallel-plate gaps. This enables lowering equivalent frequency noise down to ∼ 15μ g/√ Hz while guaranteeing a full-scale range at about 60 g, within 1.8-mm2 overall area. Such performances are demanded by all applications simultaneously requiring low noise and large dynamic range.
Exploiting Shaped Combs within FM Accelerometers for Low-Noise and Wide Dynamic Range Applications
Padovani, Christian;Pileri, Luca;Gattere, Gabriele;Langfelder, Giacomo
2025-01-01
Abstract
The work presents the first frequency-modulated (FM) in-plane accelerometer exploiting shaped combs as frequency-tuning mechanism. Their inherent advantage lies in that, while the overall tuning coefficient is unaltered with respect to former implementations based on parallel-plate tuning, the resonant-mode motion amplitude can be increased, without limitations from parallel-plate gaps. This enables lowering equivalent frequency noise down to ∼ 15μ g/√ Hz while guaranteeing a full-scale range at about 60 g, within 1.8-mm2 overall area. Such performances are demanded by all applications simultaneously requiring low noise and large dynamic range.| File | Dimensione | Formato | |
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proceeding_114_MEMS25_Exploiting_Shaped_Combs_within_FM_Accelerometers.pdf
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