Analysis of Non-linearity Sources in Piezoresistive Gyroscopic Systems

Gyroscopes, essential in numerous navigation and stabilization tasks, are highly valued for their precision and reliability. However, achieving optimal accuracy remains a significant challenge, also due to inherent non-linearities. This study focuses on identifying sources of non-linearity in NEMS-based piezoresistive MEMS gyroscopes. A comprehensive Simulink model was developed and simulated to represent the entire gyroscope system, and the results were compared with experimental data. The model identified contributions from the AQC circuit and the Wheatstone bridge, but these did not align with experimental findings. Our investigation suggests that the dominant non-linearity contribution may be due to the CFIA or the piezoresistive effect, which will be thoroughly analyzed in future works.