Characterization of Damping and Stiffness Mismatch on a Dual Foucault Pendulum Structure Manufactured in 30-μm-Thick Epitaxial Polysilicon

This work presents the first characterization results in terms of aniso-damping and aniso-stiffness of Dual Foucault Pendulum (DFP) structures fabricated in a mass-market MEMS process, to be used as angle sensors. Devices are designed within (3.5 mm)2 and feature linear electrostatic driving and sensing combs, along with linear-tuning tapered combs. The modes are set at 29 kHz, with quality factors in the range of 3· 105. Measured aniso-damping is in the 1.5% range, while aniso-stiffness causes ± 45 Hz mismatch dispersion. This value can be fully compensated by the tapered combs, to mode-match the modes within few ppm.