The functioning of Micro-Electro-Mechanical Systems based on resonant elements can be severely affected by unwanted external vibrations. In this work, we propose to isolate a MEMS resonator from external disturbances around its driven frequency through a meta material plate, integrated in the same device. Transmission and dynamic analyses show the absorption properties of the metaplate and assess the advantage of the proposed solution.
A MEMS device integrating a metaplate for vibration absorption
D. Faraci;V. Zega;C. Comi
2024-01-01
Abstract
The functioning of Micro-Electro-Mechanical Systems based on resonant elements can be severely affected by unwanted external vibrations. In this work, we propose to isolate a MEMS resonator from external disturbances around its driven frequency through a meta material plate, integrated in the same device. Transmission and dynamic analyses show the absorption properties of the metaplate and assess the advantage of the proposed solution.File in questo prodotto:
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