This work focuses on the short- and long-term accuracy of micromirrors built with silicon micromachining processes, embedding both lead-zirconatetitanate (PZT) thin films and buried piezoresistors (PZR). In particular, PZT-based and PZR-based sensing is comparatively characterized in terms of noise, temperature stability and hysteresis. In the best configuration, the system achieves 115 dB of SNR at 14° mechanical aperture (56° field of view) through the PZT output. Additionally, through a weighted sum of PZT and PZR sensing outputs, temperature stability is kept within ±0.6% over 80°C sweep on several samples, which is >10 times below the native values of the individual (PZT or PZR) outputs.
Combining Piezoresistive and Piezoelectric Sensing in PZT-Driven Resonant Mems Micromirrors for Optimal Stability
Frigerio P.;Langfelder G.
2023-01-01
Abstract
This work focuses on the short- and long-term accuracy of micromirrors built with silicon micromachining processes, embedding both lead-zirconatetitanate (PZT) thin films and buried piezoresistors (PZR). In particular, PZT-based and PZR-based sensing is comparatively characterized in terms of noise, temperature stability and hysteresis. In the best configuration, the system achieves 115 dB of SNR at 14° mechanical aperture (56° field of view) through the PZT output. Additionally, through a weighted sum of PZT and PZR sensing outputs, temperature stability is kept within ±0.6% over 80°C sweep on several samples, which is >10 times below the native values of the individual (PZT or PZR) outputs.| File | Dimensione | Formato | |
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proceeding_112_Transducers_23_Combining_Piezoresistive_and_Piezoelectric_Sensing_in_PZT_Micromirrors.pdf
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