Micro-opto-mechanical glass interferometer for megahertz modulation of optical signals

Waveguide-based interferometric circuits are widely employed in optical communications, sensing, and computing applications. In particular, glass-based devices are appealing due to the transparency and bio-compatibility of this substrate, or where low-loss interfacing with fiber networks is required. However, fast electro-optic phase modulation is hard to achieve in glass materials. Here, we demonstrate an optical phase and intensity modulator in glass, working in the megahertz range. This modulator exploits the elasto-optic effect inside a mechanical microstructure, brought to oscillation at resonance, and is entirely realized by femtosecond laser micromachining. In detail, we demonstrate 23-dB optical intensity modulation at 1.17 MHz, with an internal optical loss of the phase-modulator component as low as 0.04 dB.