The research highlights a significant challenge in microelectromechanical system (MEMS) gyroscopes operated under Lissajous frequency modulation (FM). While providing excellent inherent scale-factor stability performance and scale-factor independence of the mode mismatch, this operating principle suffers from a strict requirement in the implementation of the motion amplitude control on the two axes. It is shown how, unless a few-Hz (only) bandwidth is targeted, different amplitude-gain control (AGC) designs are all challenged and give rise to spurious harmonics which, after additional demodulation, may turn into a spurious offset, which undermines the system stability performance.

Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes

M. Bestetti;G. Gattere;C. Padovani;A. G. Bonfanti;G. Langfelder
2023-01-01

Abstract

The research highlights a significant challenge in microelectromechanical system (MEMS) gyroscopes operated under Lissajous frequency modulation (FM). While providing excellent inherent scale-factor stability performance and scale-factor independence of the mode mismatch, this operating principle suffers from a strict requirement in the implementation of the motion amplitude control on the two axes. It is shown how, unless a few-Hz (only) bandwidth is targeted, different amplitude-gain control (AGC) designs are all challenged and give rise to spurious harmonics which, after additional demodulation, may turn into a spurious offset, which undermines the system stability performance.
2023
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
978-1-6654-5147-5
gyroscope, frequency modulation, Lissajous, MEMS, stability
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1236505
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