0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit

This work introduces a system formed by an integrated circuit (IC) and a micromachined piezoresistive gyroscope, with navigation grade performance. After discussing the specifications in terms of maximum allowed electronic noise, so not to worsen the thermomechanical noise limits, three different frontend topologies are analyzed, and the current-feedback instrumentation amplifier (CFIA) is chosen as the optimal solution in terms of noise and current consumption. After coupling to a gyroscope based on nanogauges, the system demonstrates 200-dps full scale, v 0.02 (?)/h stability, and 0.004 (?)/ h angle random walk, confirming navigation-grade performance at a current consumption well below 10 mA and an overall power consumption below 40 mW.