Microsystems or Micro Electro Mechanical Systems (MEMS) are very small machines that over the last thirty years had an impressive development in terms of potentialities and diffusion. MEMS are now widespread as micro sensors and/or micro actuators and can be found in many objects of common use. The purpose of the present Chapter is to give an overview of the importance of Mechanics in the study, design and fabrication of MEMS. Inertial and piezoelectrically actuated MEMS are first described. Key issues concerning Microsystems reliability are then discussed, such as fracture, fatigue and consequences of impacts due to accidental drop, along with other uncertainty-related issues at the device scale. The content of this chapter is based on the activity carried out in our research group at the Politecnico di Milano, along the last 20 years.
Mechanics of Microsystems: A Recent Journey in a Fascinating Branch of Mechanics
Corigliano, Alberto;Ghisi, Aldo;Mariani, Stefano;Zega, Valentina
2022-01-01
Abstract
Microsystems or Micro Electro Mechanical Systems (MEMS) are very small machines that over the last thirty years had an impressive development in terms of potentialities and diffusion. MEMS are now widespread as micro sensors and/or micro actuators and can be found in many objects of common use. The purpose of the present Chapter is to give an overview of the importance of Mechanics in the study, design and fabrication of MEMS. Inertial and piezoelectrically actuated MEMS are first described. Key issues concerning Microsystems reliability are then discussed, such as fracture, fatigue and consequences of impacts due to accidental drop, along with other uncertainty-related issues at the device scale. The content of this chapter is based on the activity carried out in our research group at the Politecnico di Milano, along the last 20 years.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
