The substrate potential in Silicon Photonics chips defines the electrical properties of waveguide-integrated optoelectronic devices by counteracting the depletion of free carriers caused by oxide charges. Heater control and photoconductivity enhancement by orders of magnitude is demonstrated by means of substrate potential tuning.
Control of SiP Waveguide-Embedded Electronic Devices by Substrate/Gate Potential Tuning
Perino A.;Zanetto F.;Petrini M.;Toso F.;Morichetti F.;Melloni A.;Ferrari G.;Sampietro M.
2021-01-01
Abstract
The substrate potential in Silicon Photonics chips defines the electrical properties of waveguide-integrated optoelectronic devices by counteracting the depletion of free carriers caused by oxide charges. Heater control and photoconductivity enhancement by orders of magnitude is demonstrated by means of substrate potential tuning.File in questo prodotto:
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Perino_GFP2021.pdf
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