Phononic Crystals are entering the Micro-Electro-Mechanical System (MEMS) world thanks to their ability to manipulate the elastic waves propagation. This work presents the first defect-based MEMS Phononic Crystal (PnC) slab waveguide, employed to couple a pair of MHz out-of-plane resonators. The prototype, fabricated in a conventional 24-m-thick micromachining process and coupled to dedicated electronics, demonstrates the possibility to manipulate wave propagation properties and to efficiently couple distant MEMS resonators.

A Defect-Based MEMS Phononic Crystal Slab Waveguide

Zega V.;Gazzola C.;Buffoli A.;Langfelder G.;Frangi A.
2022

Abstract

Phononic Crystals are entering the Micro-Electro-Mechanical System (MEMS) world thanks to their ability to manipulate the elastic waves propagation. This work presents the first defect-based MEMS Phononic Crystal (PnC) slab waveguide, employed to couple a pair of MHz out-of-plane resonators. The prototype, fabricated in a conventional 24-m-thick micromachining process and coupled to dedicated electronics, demonstrates the possibility to manipulate wave propagation properties and to efficiently couple distant MEMS resonators.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1206124
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