Phononic Crystals are entering the Micro-Electro-Mechanical System (MEMS) world thanks to their ability to manipulate the elastic waves propagation. This work presents the first defect-based MEMS Phononic Crystal (PnC) slab waveguide, employed to couple a pair of MHz out-of-plane resonators. The prototype, fabricated in a conventional 24-m-thick micromachining process and coupled to dedicated electronics, demonstrates the possibility to manipulate wave propagation properties and to efficiently couple distant MEMS resonators.
A Defect-Based MEMS Phononic Crystal Slab Waveguide
Zega V.;Gazzola C.;Buffoli A.;Langfelder G.;Frangi A.
2022-01-01
Abstract
Phononic Crystals are entering the Micro-Electro-Mechanical System (MEMS) world thanks to their ability to manipulate the elastic waves propagation. This work presents the first defect-based MEMS Phononic Crystal (PnC) slab waveguide, employed to couple a pair of MHz out-of-plane resonators. The prototype, fabricated in a conventional 24-m-thick micromachining process and coupled to dedicated electronics, demonstrates the possibility to manipulate wave propagation properties and to efficiently couple distant MEMS resonators.File in questo prodotto:
| File | Dimensione | Formato | |
|---|---|---|---|
|
A_Defect-Based_MEMS_Phononic_Crystal_Slab_Waveguide.pdf
Accesso riservato
:
Publisher’s version
Dimensione
1.08 MB
Formato
Adobe PDF
|
1.08 MB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
