An innovative Micro-Electro-Mechanical System (MEMS) electrically-tunable filter exploiting bandgap and auxetic properties of a mechanical structure is here proposed for the first time to the Authors best knowledge. It embeds a deformable structure made of a periodic repetition of an auxetic unit cell and four sets of push-pull parallel-plates capacitors placed on its sides. Thanks to the bandgap properties of the auxetic structure, the proposed MEMS acts as a mechanical filter in the mega-hertz range. Electrostatic-tunability is achieved through the auxeticity of the implemented unit cell: when a DC bias voltage is applied on tuning electrodes, it induces a tensile force that deforms the structure, thus shifting the bandgap opening frequency range.

An Innovative Auxetic Electrically-Tunable Mems Mechanical Filter

Zega V.;Ardito R.;Corigliano A.
2022

Abstract

An innovative Micro-Electro-Mechanical System (MEMS) electrically-tunable filter exploiting bandgap and auxetic properties of a mechanical structure is here proposed for the first time to the Authors best knowledge. It embeds a deformable structure made of a periodic repetition of an auxetic unit cell and four sets of push-pull parallel-plates capacitors placed on its sides. Thanks to the bandgap properties of the auxetic structure, the proposed MEMS acts as a mechanical filter in the mega-hertz range. Electrostatic-tunability is achieved through the auxeticity of the implemented unit cell: when a DC bias voltage is applied on tuning electrodes, it induces a tensile force that deforms the structure, thus shifting the bandgap opening frequency range.
IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
auxetic structures
bandgap
electrostatic capacitors
MEMS
push-pull configuration
tunable mechanical filters
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1206123
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