This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.
Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides
De Vita C.;Codreanu N.;Ferrari G.;Sorel M.;Melloni A.;Morichetti F.
2021-01-01
Abstract
This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.File in questo prodotto:
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