A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.

Reduced Order Modelling in a Mems Arch Resonator Exhibiting 1:2 Internal Resonance

V. Zega;G. Gobat;A. Frangi
2022

Abstract

A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
9781665409117
MEMS, 1:2 internal resonance, numerical modelling, resonators
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1200542
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 1
  • ???jsp.display-item.citation.isi??? 0
social impact