A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.
Reduced Order Modelling in a Mems Arch Resonator Exhibiting 1:2 Internal Resonance
V. Zega;G. Gobat;A. Frangi
2022-01-01
Abstract
A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.