Frequency and Quality Factor Matched 2-Axis Dual Mass Resonator

This paper reports a novel tuning fork type 2-axis dual mass resonator with frequency and Q-factor tuning mechanisms. The resonator consists of two proof masses and extra small masses in between them, which could tune the Q-factor of each axis independently with small effect on the frequency. The experimental results showed the as-fabricated frequency and the Q-factor mismatches were 5% and 7.7%, respectively. Q-factor tuning up to 21% could be reached by changing the squeeze film damping through mode coupling induced by suitably applied DC bias. The parasitic effect on frequency shift was as small as 810 ppm. Combining with the conventional frequency tuning method by the DC bias on the main proof masses, both the frequency and Q-factor could be tuned simultaneously. Finally, the frequency matching under 10 ppm and the Q-factor matching under 650 ppm could be achieved.