Piezoelectric materials guarantee enhanced linearity and lower actuation voltages compared to electrostatic actuation in MEMS. However, when large displacements are desired, strong material nonlinearities arise and they should be efficiently modeled by predictive tools. In this work, we exploit a nonlinear modeling technique derived from Landau-Devonshire theory of ferroelectrics to predict the static response of cantilevers actuated with thin piezoelectric films. An experimental campaign performed on MEMS cantilevers actuated with PZT patches is performed to validate the model. The comparison between numerical and experimental data shows that the proposed model reliably predicts the quasi-static response of MEMS structures during both unipolar and bipolar polarization cycles.

Modeling Material Nonlinearities in Piezoelectric Films: Quasi-Static Actuation

Opreni A.;Frangi A.
2021-01-01

Abstract

Piezoelectric materials guarantee enhanced linearity and lower actuation voltages compared to electrostatic actuation in MEMS. However, when large displacements are desired, strong material nonlinearities arise and they should be efficiently modeled by predictive tools. In this work, we exploit a nonlinear modeling technique derived from Landau-Devonshire theory of ferroelectrics to predict the static response of cantilevers actuated with thin piezoelectric films. An experimental campaign performed on MEMS cantilevers actuated with PZT patches is performed to validate the model. The comparison between numerical and experimental data shows that the proposed model reliably predicts the quasi-static response of MEMS structures during both unipolar and bipolar polarization cycles.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
978-1-6654-1912-3
Actuator
Lead Zirconate Titanate
Material Nonlinearities
Piezoelectric
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1190970
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 2
  • ???jsp.display-item.citation.isi??? 2
social impact