This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.
Piezoelectric Micromirrors with Geometric and Material Nonlinearities: Experimental Study and Numerical Modeling
Opreni, Andrea;Frangi, Attilio;Merli, Massimiliano;
2020-01-01
Abstract
This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.File in questo prodotto:
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