This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.

Piezoelectric Micromirrors with Geometric and Material Nonlinearities: Experimental Study and Numerical Modeling

Opreni, Andrea;Frangi, Attilio;Merli, Massimiliano;
2020-01-01

Abstract

This paper introduces a novel model to predict the dynamic response of piezoelectric micromirrors. The model addresses both geometric nonlinearities caused by large rotation amplitudes and the nonlinear response of piezoelectric films upon the application of large drive voltages. The proposed model is applied to predict the dynamic response of a MEMS micromirror actuated with PZT films. Numerical simulations are performed through the harmonic balance finite element method and results are validated with experimental data.
2020 IEEE SENSORS, 2020
978-1-7281-6801-2
MEMS , micromirror , piezoelectric , nonlinear dynamic , PZT , harmonic balance
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1190969
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