The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to +/- 0.03 degrees, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.
Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection
Frigerio, Paolo;Langfelder, Giacomo
2021-01-01
Abstract
The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to +/- 0.03 degrees, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.| File | Dimensione | Formato | |
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proceeding_78_Transducers2021_Closed_Loop_Control_PZT_Micromirrors.pdf
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