A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.

MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets

Maspero F.;Gatani G.;Cuccurullo S.;Bertacco R.
2021

Abstract

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
978-1-6654-1912-3
MAGNETIC FLUX CONCENTRATOR
MAGNETOMETER
MEMS
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1175690
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