A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.
MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
Maspero F.;Gatani G.;Cuccurullo S.;Bertacco R.
2021-01-01
Abstract
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.File in questo prodotto:
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Maspero et al. - 2021 - MEMS Magnetometer Using Magnetic Flux Concentrator.pdf
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