Impact effects on thin silicon MEMS membranes attached to dummy devices, as observed through guided free fall tests, are investigated through three-dimensional, finite element numerical simulations. Accounting for the different scales involved, a multiscale top-down approach is followed: fluid dynamics and solid mechanics macro-scale simulations are first carried out, to provide input histories for fluid (air) pressures and relative displacements for the thin silicon membrane anchors at the micro-scale. Then, a mechanical analysis is carried out for each membrane to judge whether possible failures arise in a given guided free fall test. It is found that in some cases possible failures actually depend from the combination of the fluid-induced and of the solid-induced input transferred to the MEMS membrane, and not from a single domain-induced loading condition.

Numerical Analysis of Impact Induced Failure for MEMS Membranes during Guided Free Fall Tests

Faraci D.;Ghisi A.;Corigliano A.
2020

Abstract

Impact effects on thin silicon MEMS membranes attached to dummy devices, as observed through guided free fall tests, are investigated through three-dimensional, finite element numerical simulations. Accounting for the different scales involved, a multiscale top-down approach is followed: fluid dynamics and solid mechanics macro-scale simulations are first carried out, to provide input histories for fluid (air) pressures and relative displacements for the thin silicon membrane anchors at the micro-scale. Then, a mechanical analysis is carried out for each membrane to judge whether possible failures arise in a given guided free fall test. It is found that in some cases possible failures actually depend from the combination of the fluid-induced and of the solid-induced input transferred to the MEMS membrane, and not from a single domain-induced loading condition.
2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2020
978-1-7281-6049-8
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1171233
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