We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technology

Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction

Maspero, Federico;Langfelder, Giacomo;
2021

Abstract

We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technology
Proceeding of IEEE MEMS conference 2021
978-1-6654-1912-3
File in questo prodotto:
File Dimensione Formato  
proceeding_73_MEMS2021_accelerometro_FM_NEMS.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 1.59 MB
Formato Adobe PDF
1.59 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1167191
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 2
  • ???jsp.display-item.citation.isi??? 2
social impact