We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technology
Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction
Maspero, Federico;Langfelder, Giacomo;
2021-01-01
Abstract
We present the design, fabrication and characterization of a resonant accelerometer combining piezoresistive nanoresonators with a micrometric proof mass, achieving at the same time an exceptional frequency sensitivity (up to 10%/g) and a large bandwidth (1.5 kHz) with respect to conventional technologies. These sensors are fabricated with a 200 mm MEMS technologyFile in questo prodotto:
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