The paper discusses the design and performance of mode-split MEMS gyroscopes, based on NEMS piezoresistive detection, as a function of the frequency of the operating modes. The key concept is the independence of the performance (in terms of footprint, sensitivity and noise) with respect to the working frequency, which allows the design of more robust devices against external vibrations. A yaw gyroscope with modes around 50 kHz and a 1.5-mm2 footprint is fabricated, coupled to the same driving/sensing electronics and comparatively tested against a 20-kHz twin device: the sensor shows a scale factor of 1.4 mV/dps, noise in the mdps/Hz1/2 range and 0.5°/h stability, validating the theoretical considerations.
50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability
Gadola M.;Maspero F.;Langfelder G.;
2020-01-01
Abstract
The paper discusses the design and performance of mode-split MEMS gyroscopes, based on NEMS piezoresistive detection, as a function of the frequency of the operating modes. The key concept is the independence of the performance (in terms of footprint, sensitivity and noise) with respect to the working frequency, which allows the design of more robust devices against external vibrations. A yaw gyroscope with modes around 50 kHz and a 1.5-mm2 footprint is fabricated, coupled to the same driving/sensing electronics and comparatively tested against a 20-kHz twin device: the sensor shows a scale factor of 1.4 mV/dps, noise in the mdps/Hz1/2 range and 0.5°/h stability, validating the theoretical considerations.| File | Dimensione | Formato | |
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proceeding_72_IEEESens20_50-kHz_MEMS_gyroscopes.pdf
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