Metamaterials are artificial materials with extraordinary properties not available in nature. They are usually made by periodic structures and present a variety of applications. Here, metamaterials are employed in MicroElectroMechanical Systems (MEMS) to achieve vibration isolation of resonant devices and to design a mechanical tunable filter. A metaplate fully compatible with standard MEMS fabrication processes is designed, fabricated and tested. Experimental data validate the proposed design for the MEMS metaplate, thus opening the way to a new class of metaMEMS that can strongly improve the performances of actual MEMS devices or even provide a valid alternative to the actual state of the art.

A Metaplate in MEMS for innovative applications: Vibration isolation and tunable mechanical filters

Zega V.;Corigliano A.
2020-01-01

Abstract

Metamaterials are artificial materials with extraordinary properties not available in nature. They are usually made by periodic structures and present a variety of applications. Here, metamaterials are employed in MicroElectroMechanical Systems (MEMS) to achieve vibration isolation of resonant devices and to design a mechanical tunable filter. A metaplate fully compatible with standard MEMS fabrication processes is designed, fabricated and tested. Experimental data validate the proposed design for the MEMS metaplate, thus opening the way to a new class of metaMEMS that can strongly improve the performances of actual MEMS devices or even provide a valid alternative to the actual state of the art.
2020
Proceedings of IEEE Sensors
978-1-7281-6801-2
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1157366
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