Investigation of Gyroscopes Mechanical and Electronic Phase Drift with 2 μrad/√Hz Resolution and 12 μrad/K Accuracy

The work demonstrates a setup for the accurate calibration of the relative phase drift between sense modulated output and drive demodulation reference in MEMS gyroscopes. The system enables to operate the sensor inside a climatic chamber, with all the electronics outside, reaching 2 μrad/√Hz short-term resolution in relative phase measurements. After a one-time calibration of parasitic electrical couplings, the setup enables to measure the phase drift in temperature with a sub-5-μrad long-term stability. On average, measurements over four samples, swept vs temperature in 18 different operating conditions, deviate from modeling by 12 μrad/K only.