Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS

Phononic crystals/metamaterials are attracting increasing interest because of their large variety of applications at both the macro and micro scales. In this work, a new metamaterial plate (metaplate) composed of innovative phononic crystal unit-cells is presented, numerically studied, fabricated at the microscale and experimentally tested. Numerical simulations and experimental tests demonstrate a complete 3D phononic bandgap that guarantees a complete vibration isolation in a certain range of frequency. Moreover, its compatibility with Micro Electro Mechanical Systems (MEMS) fabrication processes suggests applications for vibration isolation of MEMS resonant devices. The measured transmission diagram shows a -30 dB attenuation level, which is in good agreement with numerical predictions. The proposed design opens up new perspectives for the development of vibration isolation applications for MEMS resonators.