We report on CMOS compatible high-refractive-index contrast Silicon Oxycarbide (SiOC) waveguides for integrated optic applications. This photonic platform exhibits wide refractive index tunability, high thermo-optic coefficient K=4.58x10 -5 °C -1 ,high TPA threshold 5.57 x 10-3 GW/cm2 and also high nonlinear refractive index 3.29 x 10-14 cm2/W.
PECVD Silicon Oxycarbide for Integrated Photonics
Christian De Vita;Francesco Morichetti;Andrea Melloni
2020-01-01
Abstract
We report on CMOS compatible high-refractive-index contrast Silicon Oxycarbide (SiOC) waveguides for integrated optic applications. This photonic platform exhibits wide refractive index tunability, high thermo-optic coefficient K=4.58x10 -5 °C -1 ,high TPA threshold 5.57 x 10-3 GW/cm2 and also high nonlinear refractive index 3.29 x 10-14 cm2/W.File in questo prodotto:
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