SU-8 inkjet patterning for microfabrication

Controlled SU-8 inkjet printing constitutes an attractive approach to realize electronic microstructures, MEMS, microfluidic devices or transducers. Indeed, inkjet printing is the most promising low-cost manufacturing process capable of depositing functional materials with high resolution, making this technique attractive for micrometric patterning. On the base of these premises, it's here presented the possibility to successfully print SU-8 complex patterned structures. Indeed, two different diluted SU-8 mixtures are successfully printed and a deep analysis on the effect of the physical parameters of the solvent is presented. The main challenges in SU-8 inkjet patterning are individuated and discussed through the evaluation of different shapes presenting critical printing aspects. In addition, some possible approaches to address such challenges are presented. Finally, the possibility to use inkjet printed SU-8 masks as templates for metal electrodeposition is demonstrated.