The thermal tuning efficiency of silicon nitride devices is enhanced by about four times by integrating a high-refractive index coating of silicon oxycarbide (SiOC) with a record thermo-optic coefficient of 2.5×10-4 °C-1.
Boosting the thermo-optic efficiency of silicon nitride waveguides
Faisal Ahmed Memon;Andrea Melloni;Francesco Morichetti
2018-01-01
Abstract
The thermal tuning efficiency of silicon nitride devices is enhanced by about four times by integrating a high-refractive index coating of silicon oxycarbide (SiOC) with a record thermo-optic coefficient of 2.5×10-4 °C-1.File in questo prodotto:
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