Silicon oxycarbide thin films deposited with rf reactive magnetron sputtering a SiC target are exploited to demonstrate photonic waveguides with a high refractive index of 1.82 yielding an index contrast of 18% with silica glass. The propagation losses of the photonic waveguides are measured at the telecom wavelength of 1.55 um by cut-back technique. The results demonstrate the potential of silicon oxycarbide for photonic applications.
Silicon Oxycarbide Waveguides for Photonic Applications
Morichetti F.;Melloni A.
2018-01-01
Abstract
Silicon oxycarbide thin films deposited with rf reactive magnetron sputtering a SiC target are exploited to demonstrate photonic waveguides with a high refractive index of 1.82 yielding an index contrast of 18% with silica glass. The propagation losses of the photonic waveguides are measured at the telecom wavelength of 1.55 um by cut-back technique. The results demonstrate the potential of silicon oxycarbide for photonic applications.File in questo prodotto:
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