MEMS gyroscopes are micro-devices able to measure the external angular rate through the exploitation of different physical phenomena among which the Coriolis force is the most common one. A new working principle based on the frequency modulation (FM) has been recently proposed for micro-gyroscopes and the authors are currently working on the design and experimental verification of pitch and three-axial devices. The recent advances will be presented at the colloquium.

Frequency modulated (FM) micro-gyroscopes: recent advances

V. Zega;C. Comi;G. Langfelder;A. Corigliano
2018-01-01

Abstract

MEMS gyroscopes are micro-devices able to measure the external angular rate through the exploitation of different physical phenomena among which the Coriolis force is the most common one. A new working principle based on the frequency modulation (FM) has been recently proposed for micro-gyroscopes and the authors are currently working on the design and experimental verification of pitch and three-axial devices. The recent advances will be presented at the colloquium.
2018
Proceedings of EUROMECH Colloquium 603 Dynamics of micro and nano electromechanical systems: multi-field modelling and analysis
978-989-746-185-9
micro-gyroscope, frequency modulation, MEMS
File in questo prodotto:
File Dimensione Formato  
Euromech603.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 1.15 MB
Formato Adobe PDF
1.15 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1077205
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact