A dual-mass frequency-modulated (FM) pitch gyroscope: Mechanical design and modelling

Frequency-modulated (FM) Micro-Electro-Mechanical Systems (MEMS) gyroscopes have been recently proposed as a valid alternative to their amplitude-modulated (AM) counterpart in order to achieve high scale factor stability against fabrication imperfections and environmental fluctuations. Innovative mechanical design and accurate estimates of the quality factor of the two driven modes are required to operate the pitch gyroscope according to the FM working principle. In this work, the mechanical structure of a new dual-mass FM pitch gyroscope is presented together with the analytical and numerical models adopted during the design process to estimate the reliability of the structure and the quality factor. Preliminary experimental characterization of the new device proves the validity of the simulation models and the effectiveness of the proposed design.