Germanium-on-silicon waveguides are designed, fabricated and characterized with a novel near-field infrared spectroscopy technique that allows on-chip investigation of the in-coupling efficiency. On-chip propagation along bends and straight sections up to 0.8 mm is demonstrated around λ = 6 μm.
Integrated germanium-on-silicon waveguides for mid-infrared photonic sensing chips
Frigerio, Jacopo;Isella, Giovanni;Biagioni, Paolo;
2017-01-01
Abstract
Germanium-on-silicon waveguides are designed, fabricated and characterized with a novel near-field infrared spectroscopy technique that allows on-chip investigation of the in-coupling efficiency. On-chip propagation along bends and straight sections up to 0.8 mm is demonstrated around λ = 6 μm.File in questo prodotto:
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