Microelectromechanical systems integrating motion and displacement sensors

The purpose of this chapter is to describe the working principle of the microelectromechanical systems (MEMS) devices used in motion sensors and to consider their level of sophistication, performance limits, and future evolution. The integration of a multiparameter sensor in a single unit can increase the smartness of the device and enables the implementation of new functionalities in existing electronic systems. MEMS accelerometers, gyroscopes, and magnetometers are discussed in detail, as they represent the core devices for the development of a high-precision inertial measurement unit. At the end of the chapter, consideration is given to the evolution of these units integrating new MEMS devices for added functionalities, such as pressure sensing or proximity measurements.