This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumer-grade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 μA), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw- and pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24- μm-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/ °C of variability over a 25-70 °C temperature range.

High Scale-Factor Stability Frequency-Modulated MEMS Gyroscope: 3-Axis Sensor and Integrated Electronics Design

Minotti, Paolo;Dellea, Stefano;Mussi, Giorgio;Bonfanti, Andrea;Facchinetti, Stefano;Tocchio, Alessandro;Zega, Valentina;Comi, Claudia;Lacaita, Andrea Leonardo;Langfelder, Giacomo
2018

Abstract

This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumer-grade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 μA), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw- and pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24- μm-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/ °C of variability over a 25-70 °C temperature range.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1048424
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