In this work, additive manufacturing and wet metallization process are combined to fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart combination of existing fabrication processes makes the proposed fabrication flow unique in the sensors field. The mechanical design of the three proposed devices exploits the three-dimensionality of the 3D-printing technique and the electrostatic differential readout is allowed thanks to the wet-metallization process of the printed structure. Experimental measurements show a very good agreement with theoretical predictions thus proving a good reliability of the proposed design flow and fabrication process. With their relative small footprints (minimum dimension in the order of hundreds of μ m), good performances (sensitivity > 12 fF/g, sub % linearity error up to 11 g of full scale and theoretical noise estimation of few tens of ng/√Hz) and high customizability, they represent an important step toward novel application fields of inertial sensors.

The first 3D-printed z-axis accelerometers with differential capacitive sensing

Zega, Valentina;Credi, Caterina;Bernasconi, Roberto;Langfelder, Giacomo;Magagnin, Luca;Levi, Marinella;Corigliano, Alberto
2018

Abstract

In this work, additive manufacturing and wet metallization process are combined to fabricate three prototypes of differential electro-mechanical z-axis accelerometers. The smart combination of existing fabrication processes makes the proposed fabrication flow unique in the sensors field. The mechanical design of the three proposed devices exploits the three-dimensionality of the 3D-printing technique and the electrostatic differential readout is allowed thanks to the wet-metallization process of the printed structure. Experimental measurements show a very good agreement with theoretical predictions thus proving a good reliability of the proposed design flow and fabrication process. With their relative small footprints (minimum dimension in the order of hundreds of μ m), good performances (sensitivity > 12 fF/g, sub % linearity error up to 11 g of full scale and theoretical noise estimation of few tens of ng/√Hz) and high customizability, they represent an important step toward novel application fields of inertial sensors.
3D-printing; differential z-axis accelerometer; Electro-mechanical systems; wet metallization; Instrumentation; Electrical and Electronic Engineering
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1048036
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