In this work, the mechanical design and the experimental validation of a microelectromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ knowledge, the first small-footprint (690 μm × 946 μm) prototype of FM gyroscope able to measure an in-plane angular rate. The measured scale factor, defined as the mean angular gain, equals 0.973 Hz/Hz, in close agreement with theoretical predictions. It depends only on the mass distribution in the mechanical structure and is, consequently, not influenced by environmental fluctuations.
The First Frequency-Modulated (FM) Pitch Gyroscope
Zega, Valentina;Minotti, Paolo;Mussi, Giorgio;Bonfanti, Andrea;Lacaita, Andrea L.;Comi, Claudia;Langfelder, Giacomo;Corigliano, Alberto
2017-01-01
Abstract
In this work, the mechanical design and the experimental validation of a microelectromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ knowledge, the first small-footprint (690 μm × 946 μm) prototype of FM gyroscope able to measure an in-plane angular rate. The measured scale factor, defined as the mean angular gain, equals 0.973 Hz/Hz, in close agreement with theoretical predictions. It depends only on the mass distribution in the mechanical structure and is, consequently, not influenced by environmental fluctuations.| File | Dimensione | Formato | |
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