Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro-Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.

Accurate simulation of parametrically excited micromirrors via direct computation of the electrostatic stiffness

Frangi, Attilio;Guerrieri, Andrea;
2017

Abstract

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro-Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1042955
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