We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.

Parametric Resonance in Electrostatically Actuated Micromirrors

Frangi, Attilio;Guerrieri, Andrea;
2017-01-01

Abstract

We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of parametric resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.
2017
Continuation approaches; Mathieu equation; micromirrors; microoptoelectromechanical systems (MOEMS); parametric resonance; Control and Systems Engineering; Electrical and Electronic Engineering
File in questo prodotto:
File Dimensione Formato  
TIE16 mirror.pdf

accesso aperto

: Publisher’s version
Dimensione 891.19 kB
Formato Adobe PDF
891.19 kB Adobe PDF Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1042954
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 31
  • ???jsp.display-item.citation.isi??? 26
social impact