Infrared structured light generation by optical MEMS and application to depth perception

Three-dimensional imaging solutions provide depth perception that cannot be achieved with traditional two-dimensional systems. A 3D optical inspection system can be implemented using structured light as 3D sensing technology. In this paper, we show that structured light can be projected onto the measured object by means of an innovative scanning microsystem that employs a single-axis torsional MEMS mirror for fast steering a near infra-red laser beam on a diffractive silicon microstructure. As a proof of principle of the functionality of the designed microsystem, the generated line patterns are shone on 3D objects and deformation of the projected lines is detected with a CMOS camera. From line deformation, the object depth is calculated and found in accordance to the geometrical size. The developed miniaturized solution overcomes typical drawbacks of other scanning technologies such as large size and heavy weight.