This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 μA), low-phase-noise (-135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 μm)2 z-axis MEMS sensor fabricated in a 24-μm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both independent of process nonuniformities.

A 160 ua, 8 mdps/rt-Hz frequency-modulated MEMS yaw gyroscope

MINOTTI, PAOLO;MUSSI, GIORGIO;DELLEA, STEFANO;BONFANTI, ANDREA GIOVANNI;LACAITA, ANDREA LEONARDO;LANGFELDER, GIACOMO;ZEGA, VALENTINA;COMI, CLAUDIA;FACCHINETTI, STEFANO;TOCCHIO, ALESSANDRO
2017

Abstract

This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 μA), low-phase-noise (-135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 μm)2 z-axis MEMS sensor fabricated in a 24-μm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both independent of process nonuniformities.
4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
9781509032334
Instrumentation
File in questo prodotto:
File Dimensione Formato  
proceeding_41_INERTIAL2017_FMGYAW.pdf

Accesso riservato

: Publisher’s version
Dimensione 1.77 MB
Formato Adobe PDF
1.77 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1032030
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 14
  • ???jsp.display-item.citation.isi??? 3
social impact