This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 μA), low-phase-noise (-135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 μm)2 z-axis MEMS sensor fabricated in a 24-μm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/âHz, both independent of process nonuniformities.
A 160 ua, 8 mdps/rt-Hz frequency-modulated MEMS yaw gyroscope
MINOTTI, PAOLO;MUSSI, GIORGIO;DELLEA, STEFANO;BONFANTI, ANDREA GIOVANNI;LACAITA, ANDREA LEONARDO;LANGFELDER, GIACOMO;ZEGA, VALENTINA;COMI, CLAUDIA;FACCHINETTI, STEFANO;TOCCHIO, ALESSANDRO
2017-01-01
Abstract
This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 μA), low-phase-noise (-135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 μm)2 z-axis MEMS sensor fabricated in a 24-μm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/âHz, both independent of process nonuniformities.File in questo prodotto:
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