In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses.
Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation
MASSIMINO, GIANLUCA;D'ALESSANDRO, LUCA;ARDITO, RAFFAELE;CORIGLIANO, ALBERTO
2017-01-01
Abstract
In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses.File in questo prodotto:
| File | Dimensione | Formato | |
|---|---|---|---|
|
EuroSimE_17-paper-final.pdf
accesso aperto
:
Publisher’s version
Dimensione
240.68 kB
Formato
Adobe PDF
|
240.68 kB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
