In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses.

Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation

MASSIMINO, GIANLUCA;D'ALESSANDRO, LUCA;ARDITO, RAFFAELE;CORIGLIANO, ALBERTO
2017

Abstract

In this paper a complete Multiphysics modelling via the Finite Element Method (FEM) of an air-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is described, with its experimental validation related to the mechanical and acoustic responses.
2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2017
9781509043446
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/1031651
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