Four specimens in the sub-micrometre range and with different polishing were topographically investigated in five areas over their respective surfaces. Uncertainties were evaluated with and without correction for systematic behaviour and successively analysed by a design of experiment (DOE). Results showed that the correction for systematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate to completely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.

Correction of Systematic Behaviour in Topographical Surface Analysis

BARUFFI, FEDERICO;ANNONI, MASSIMILIANO PIETRO GIOVANNI;PARENTI, PAOLO;
2016-01-01

Abstract

Four specimens in the sub-micrometre range and with different polishing were topographically investigated in five areas over their respective surfaces. Uncertainties were evaluated with and without correction for systematic behaviour and successively analysed by a design of experiment (DOE). Results showed that the correction for systematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate to completely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
2016
Proceedings of 4M/IWMF2016
978-981-11-0749-8
978-981-11-0749-8
Systematics, Systematic effects, Surface analysis, Topography, DOE,
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1023896
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