Four specimens in the sub-micrometre range and with different polishing were topographically investigated in five areas over their respective surfaces. Uncertainties were evaluated with and without correction for systematic behaviour and successively analysed by a design of experiment (DOE). Results showed that the correction for systematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate to completely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.
Correction of Systematic Behaviour in Topographical Surface Analysis
BARUFFI, FEDERICO;ANNONI, MASSIMILIANO PIETRO GIOVANNI;PARENTI, PAOLO;
2016-01-01
Abstract
Four specimens in the sub-micrometre range and with different polishing were topographically investigated in five areas over their respective surfaces. Uncertainties were evaluated with and without correction for systematic behaviour and successively analysed by a design of experiment (DOE). Results showed that the correction for systematic behaviour allowed for a lower value of the estimated uncertainty when the correction was adequate to completely recognise the systematic effects. If not, the correction can produce an overestimation of the uncertainty.File in questo prodotto:
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