The performance verification of a co-ordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability, and measurement traceability to the definition of the meter. The state-of-the-art ISO 10360 standard series is the reference text about the procedure of verification for the CMS. Specifically, ISO 10360-8 considers optical distance sensor-based CMSs. This paper proposes procedures and artifacts for the performance verification of focus variation-based CMS for a simultaneous 4-axis measuring mode. The proposal is inspired by, but goes beyond, the ISO 10360 standard, proposing an original solution for simultaneous linear and rotational axes verification.

Performance Verification of a 4-Axis Focus Variation Co-Ordinate Measuring System

MORONI, GIOVANNI;SYAM, WAHYUDIN PERMANA;PETRO', STEFANO
2017-01-01

Abstract

The performance verification of a co-ordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability, and measurement traceability to the definition of the meter. The state-of-the-art ISO 10360 standard series is the reference text about the procedure of verification for the CMS. Specifically, ISO 10360-8 considers optical distance sensor-based CMSs. This paper proposes procedures and artifacts for the performance verification of focus variation-based CMS for a simultaneous 4-axis measuring mode. The proposal is inspired by, but goes beyond, the ISO 10360 standard, proposing an original solution for simultaneous linear and rotational axes verification.
2017
Co-ordinate measuring systems (CMSs); focus variation microscopy (FVM); ISO 10360 standards; performance evaluation; Instrumentation; Electrical and Electronic Engineering
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1017142
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